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Vacuum coating equipment purchase Notes
4/27/2011 From：web
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★ furnace can choose from stainless steel, carbon steel or a combination of double layer made of water-cooled structure.
★ According to the specifications and process requirements to select a different type of coating equipment, the types of resistance evaporation, electron beam evaporation, magnetron sputtering, reactive magnetron sputtering, ion plating, hollow cathode ion plating, ion plating and so on.
★ fixture operation in the form of rotation, revolution and revolution + rotation mode, the user can make the substrate size and shape of the corresponding requirements, scope and speed of rotation of rotational accuracy: general adjustable and frequency control.
★ vacuum system by a mechanical pump, diffusion pump, oil pressure pump, by expanding pumps, Roots pumps, molecular pumps and the crucible round match with them a variety of pneumatic, manual and electric valves, piping and other components.
★ coated according to the process required to select the manner and form, such as resistance evaporation (tungsten, molybdenum boat, graphite boat) magnetron source (coaxial cylindrical magnetron source, the park columnar planar magnetron source, the rectangular planar magnetron source Etc.) to target the source material and the size of multi-arc (Ф60, Ф80 diameter target, pneumatic, electric arc, etc.), vacuum measurement gauges optional Intelligent Digital measurement of high-quality regulation, and other measuring instruments, Such as automatic pressure control device and so on. Thickness measurement can be used measuring the sheet resistance, transmittance meter and so on.
★ method may be used inflatable mass flowmeter, rotameter and the corresponding inflatable + needle valves, and can choose multiple lines and the corresponding flow parameters of inflation.
★ According to the structure proposed to be baking baking temperature, the material and the required instruments with the corresponding measurements.
★ According to the device features the option of manual, semi automatic control mode or a combination thereof.
★ sound alarm system, the body of the vacuum chamber, diffusion pump down phase, water, air, power load, over voltage, over current and other abnormal sound and light alarm.
Source: New targets target network information |
| 4/27/2011 |
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